Title

Fabrication and Characterization of Microstructures with Optical Quality Surfaces in Fused Silica Glass Using Femtosecond Laser Pulses and Chemical Etching

Document Type

Article

Publication Date

11-1-2006

Publication Title

Applied Optics

Abstract

We present a study of the sidewall surface quality inside microchannels fabricated in fused silica glass by femtosecond laser pulses and chemical etching. Multiple combinations of laser exposure and etching solution parameters were examined. Results of scanning electron microscopy, atomic force microscopy, and optical reflection analyses of the surfaces are presented. The results obtained demonstrate the feasibility of optical quality surface fabrication, which in turn demonstrates the feasibility of fabricating complex integrated devices containing microfluidic channels and optical waveguides in the glass substrates.

Volume

45

Issue

28

First Page

7519

Last Page

7523

DOI

DOI: 10.1364/AO.45.007519

ISSN

0003-6935

Rights Statement

© 2006 Optical Society of America

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