Title
Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering
Document Type
Article
Publication Date
5-10-2000
Publication Title
Materials Science Forum
Volume
Volumes 338-342
First Page
841
Last Page
844
DOI
https://doi.org/10.4028/www.scientific.net/MSF.338-342.841
ISSN
1662-9752
Rights Statement
© 2000 Trans Tech Publications, Switzerland
Recommended Citation
Mitchel, W.C.; Brown, J.; Buckanan, D.; Bertke, R.; Malalingham, K.; Orazio, F.; Pirouz, P.; Tseng, Huang-Ju R.; Ramabadran, Uma; and Roughani, Bahram, "Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering" (2000). Physics Publications. 46.
https://digitalcommons.kettering.edu/physics_facultypubs/46
